| 摘要 |
PROBLEM TO BE SOLVED: To provide the head structure of a device for pulling a silicon single crystal, capable of preventing the invasion of dust into a main chamber, wherein the dust is generated from a wire sliding portion, etc., in a head chamber. SOLUTION: A wire 13 rotates and simultaneously pulls a silicon single crystal bar 11 from a silicon melted liquid in a main chamber 12, and the wire is wound up on a wire-winding mechanism 14. The wire winding mechanism 14 is received in a head chamber 16, which communicates with the main chamber 12. The first switch valve 51 is disposed in the first pipe line 41 connecting for the suction port 33a of a vacuum pump 33 for the head to the head chamber. A changeover valve 36 is disposed in the second pipe line 42 for connecting the exhaust port 33b of the vacuum pump 33 for the head to a filter 34, and the second switch valve 52 is further disposed in the third pipe line 43 for connecting the filter to the head chamber. A controller controls the vacuum pump for the head chamber, the first switch valve, the changeover valve and the second switch valve.
|
