| 摘要 |
PROBLEM TO BE SOLVED: To obtain a member exhibiting corrosion resistance to plasma of gaseous halogen more excellent than that of an aluminum oxide member by forming a fluoride magnesium film on the surface of a base material composed of ceramics, glass, metal or a metal matrix composite material. SOLUTION: Preferably, a magnesium fluoride film is composed of a magnesium difluoride film, moreover, the thermal expansion coefficient of a base material is 8.5 to 14.0×10-6, furthermore, the base material is composed of a magnesium oxide sintered body, or the base material is a corrosion resistant member of an aluminum alloy matrix composite material. The base material composed of a magnesium oxide sintered body or an aluminum alloy matrix composite material is produced by a prescribed method. By roughening the surface of the base material by sand blasting or the like, the adhesive strength between the base material and the magnesium fluoride film is improved. Then, the fluoride film of magnesium difluoride is formed on the surface of the base material by vapor deposition, thermal spraying or the like.
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