Process of controlling particle size of naphthoquinone diazide esters

摘要

A process for producing a naphthoquinone diazide ester of a phenolic compound that is useful in a photoresist composition, which process comprises providing a naphthoquinone diazide ester solution in an organic polar solvent; adding the resulting naphthoquinone diazide ester solution to a precipitation bath that is maintained at a temperature of from about 0 DEG C. to about -30 DEG C.; and filtering the resulting naphthoquinone diazide ester.