| 摘要 |
PROBLEM TO BE SOLVED: To cut running costs without requiring an inactive gas, its sealing device, and an expense for the inactive gas. to facilitate operational administration, and to maintain the resistivity of pure water stored in a storage tank effectively. SOLUTION: A water quality maintaining apparatus is composed of a multi- effect pure water production apparatus 1, a pure water storage tank 2, a vacuum generation device 3 for evacuating the tank 2. The device 3 is the vacuum pump vent condenser of the apparatus 1. The pure water production apparatus 1 comprises an evaporator 4, utility pumps 5, a pure water pump 6, and a vacuum pump vent condenser. The storage tank 2 is evacuated at a degree of vacuum of -5 to -760 mmHg by the pump vent condenser of the high temperature pure water production apparatus 1, and the air in the tank is removed. The pure water obtained by the apparatus 1 is sent to the storage tank 2. The resistivity of the pure water sent to the tank 2 is maintained.
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