| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a multiplayer piezoelectric actuator in which the inner electrode has a profile approximate to design values and fluctuation of displacement is suppressed. SOLUTION: A plurality of first and second inner electrodes 7, 10 are arranged in a sintered ceramic 17 through a ceramic layer while being overlapped in the thickness direction. The first and second inner electrodes 7, 10 are led out alternately to first or second side face 17a, 17b in the thickness direction and first and second outer electrodes 15, 16 are formed to cover the first or second side face 17a, 17b. The ceramic layer is polarized in the thickness direction between the inner electrodes 7, 10 and, at the height where the inner electrodes 7, 10 are formed, dummy electrodes 8, 11 are formed between the end of the inner electrodes 7, 10 on the side opposite to the side where the outer electrodes 15, 16 are connected electrically, and the counterpart outer electrodes 15, 16.</p> |
