| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent sticking by providing a sensor element or actuator element with a sticking-preventive surface coating protective layer. SOLUTION: The sensor element or actuator element for a hot film type air mass sensor equipped with a plug connecting part 13 having plural electric terminals, an evaluation circuit 15, an electric instrument chamber cover 14, a measurement channel cover 16, a supporting thin plate 11, a sensor element 10 and air supplying channel 12 is coated with a liquid containing at least one compound selected from a fluoropolymer, a fluoromocer, a fluorine- containing silane, a polymer of fluorocarbon resin and a partially fluorinated polymer. The obtained 10 nm-10μm thick protective film made of the sticking- preventive surface coating film 20 can decrease sticking of a composite material comprising at least 2 selected from among polluted water, petroleum, droplet, soot, salt, a hydrocarbon and a dust particle. The surface coating has temperature stability at least up to 200 deg.C.</p> |
