BONDED MATERIAL OF CERAMIC MEMBER AND METAL MEMBER AND WAFER SUPPORTING MEMBER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To effectively prevent formation of a gap on a bonding layer for bonding a ceramic member to a flange part of a metal member by heat stress following a heat cycle and peel of the flange part and to improve durability. SOLUTION: A flange part of a metal member is bonded to a ceramic member by a bonding layer composed of a brazing material and a stress relaxation member having a difference in thermal expansion between the ceramic member and the stress relaxation member of <=2×10-6/ deg.C is bonded to the flange part by a bonding layer composed of a brazing material. The thickness of the stress relaxation member is <=1 mm, its width is wider than the length of the flange part of the metal member, the outer peripheral edge part at the side bonded to the flange part is provided with a notch part 3 and the distance L from the starting point of the notch part 3 to the outer periphery of the flange part is 0<=L<=2 mm.