发明名称 Positioning apparatus
摘要 The invention relates to a positioning apparatus, providing for an excursion of a tool (12) with respect to a sample or medium to be interacted with. The positioning apparatus comprises apparatus for applying a driving force (FD) which causes the excursion of the tool (12). Counteracting apparatus is provided which exerts a counteracting force (FC) to the driving force (FD). The counteracting apparatus comprises a deformable substance (25) which is mechanically coupled to the tool (12) and effects the counteracting force (FC) and further comprises adjustment means (28) allowing to adjust the deformability of the deformable substance (25).
申请公布号 US6076397(A) 申请公布日期 2000.06.20
申请号 US19970982106 申请日期 1997.12.01
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BINNIG, KARL GERD;HAEBERLE, WALTER;ROHRER, HEINRICH
分类号 B23Q3/18;B23Q11/00;G01B5/00;G01B5/28;G01Q10/02;G01Q10/04;(IPC1-7):G01B5/28 主分类号 B23Q3/18
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