发明名称 |
Method of forming robust metal, metal oxide, and metal alloy layers on ion-conductive polymer membranes |
摘要 |
The invention is to a dual beam process for providing an ion-conducting membrane with a thin metal or metal-oxide film. The process includes the cleaning of a membrane surface with a low energy electron beam followed by the deposition of the metal or metal-oxide film by a high energy electron beam of ions.
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申请公布号 |
US6077621(A) |
申请公布日期 |
2000.06.20 |
申请号 |
US19980003228 |
申请日期 |
1998.01.06 |
申请人 |
DE NORA S.P.A. |
发明人 |
ALLEN, ROBERT J.;GIALLOMBARDO, JAMES R. |
分类号 |
C08J5/22;C23C14/02;C23C14/20;C23C14/32;C25B9/10;G01N27/49;H01M4/88;H01M8/02;H01M8/10;(IPC1-7):H01M4/02 |
主分类号 |
C08J5/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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