发明名称 Sol-gel deposition of buffer layers on biaxially textured metal substances
摘要 A method is disclosed for forming a biaxially textured buffer layer on a biaxially oriented metal substrate by using a sol-gel coating technique followed by pyrolyzing/annealing in a reducing atmosphere. This method is advantageous for providing substrates for depositing electronically active materials thereon.
申请公布号 US6077344(A) 申请公布日期 2000.06.20
申请号 US19970922173 申请日期 1997.09.02
申请人 LOCKHEED MARTIN ENERGY RESEARCH CORPORATION 发明人 SHOUP, SHARA S.;PARANTHAMAM, MARIAPPAN;BEACH, DAVID B.;KROEGER, DONALD M.;GOYAL, AMIT
分类号 C21D8/12;C23C14/02;C23C18/12;C30B5/00;C30B23/02;C30B25/02;H01L39/24;(IPC1-7):C30B1/02;B05D3/02;B05D1/36 主分类号 C21D8/12
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