| 摘要 |
A method is provided for fabricating a dual damascene structure on a substrate with a first dielectric layer, an etching stop layer, a second dielectric layer, and a hard mask layer formed on it. The first step is to define the hard mask layer in order to form the first hole, which corresponds to the position of the conductive layer exposing the second dielectric layer. Then, an etching process, including an etching step with medium SiO2/SiN etching selectivity and an over-etching step with high SiO2/SiN etching selectivity, is performed to form the second hole and the third hole. Finally, a glue/barrier layer and a metal layer are filled into the second hole and the third hole, thus accomplishing a dual damascene structure.
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