发明名称 DEVICE FOR PRODUCING SINGLE CRYSTAL INGOT
摘要 PROBLEM TO BE SOLVED: To provide a Czochralski method single crystal ingot production device capable of stably producing the single crystal ingot without being affected by the irregular elongation of a wire and the shifted hooked position of a holder. SOLUTION: In this device for producing the ingot of a single crystal 1 by Czochralski method, a hooking step portion 1a of the single crystal 1 during its production by Czochralski method is hooked with a holder 50 and then pulled. Therein, a flexible mechanism for absorbing the irregular elongation of a wire 4, etc., is attached to the middle portion of the wire 4, and the irregular elongation of the wires 4, etc., are absorbed with the flexible mechanism.
申请公布号 JP2000169291(A) 申请公布日期 2000.06.20
申请号 JP19990277257 申请日期 1999.09.29
申请人 KOMATSU ELECTRONIC METALS CO LTD;KOMATSU LTD 发明人 KUROSAKA SHOEI;TOMIOKA JUNSUKE;KOBAYASHI MASAKAZU;MIMURA KAZUHIRO;OKAMURA KENJI;KADOTA HIROSHI;OJI NARUTOSHI;YOSHINADA YUTAKA
分类号 H01L21/208;C30B15/30;C30B29/06;(IPC1-7):C30B15/30 主分类号 H01L21/208
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