发明名称 |
Cata-dioptric reduction projection optical system |
摘要 |
In a cata-dioptric optical system having a combination of a reflection system and a refraction system for reduction-projecting an object on a first plane onto a second plane, a polarization beam splitter and a quarter wavelength plate are provided to split the incident light and the reflected light. The light beam directed to the polarization beam splitter is converted to a substantially collimated light beam by a first group of lenses. A second group of lenses are arranged between the polarization beam splitter and a concave reflection mirror to diverge the light beam. The light reflected by the concave reflection mirror is directed back to the polarization beam splitter with a substantially collimated state by the second group of lenses. The light beam from the second group of lenses transmitted through the polarization beam splitter is focused by a third group of lenses having a positive refraction power to form a reduced image.
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申请公布号 |
USRE36740(E) |
申请公布日期 |
2000.06.20 |
申请号 |
US19950490700 |
申请日期 |
1995.06.14 |
申请人 |
NIKON CORPORATION |
发明人 |
ICHIHARA, YUTAKA;MIZUTANI, HIDEO;HASHIMOTO, SUMIO;SUENAGA, YUTAKA |
分类号 |
G02B17/08;G02B27/00;G02B27/28;G03F7/20;(IPC1-7):G02B5/30 |
主分类号 |
G02B17/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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