| 发明名称 |
Process chamber exhaust system |
| 摘要 |
A method and apparatus for exhausting gases out of multiple processing regions is provided and generally comprises first and second pumping channels disposed in first and second processing regions and connected to a pump via a common exhaust port.
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| 申请公布号 |
US6077157(A) |
申请公布日期 |
2000.06.20 |
| 申请号 |
US19960749613 |
申请日期 |
1996.11.18 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
FAIRBAIRN, KEVIN;PONNEKANTI, HARI K. |
| 分类号 |
C23C14/00;B05C11/08;C23C16/44;C23C16/54;H01L21/00;H01L21/205;H01L21/31;(IPC1-7):B05G15/00 |
主分类号 |
C23C14/00 |
| 代理机构 |
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代理人 |
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