CHEMICAL SUBSTANCE SUPPLY APPARATUS EQUIPPED WITH ULTRASONIC HEIGHT SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a reliable apparatus and method for properly supplying a ultrahigh pure chemical substance to a semiconductor treatment reactor. SOLUTION: In the apparatus for moving an ultrahigh purity chemical substance from a storage container 12 to a relatively small receiver for the sake of a semiconductor treatment reactor, an ultrasonic height sensor 38 is used and the chemical substance is automatically distributed to the receiver from the storage container 12 corresponding to the signal generated by the sensor 38. The ultrasonic height sensor 38 is fit for a high viscosity chemical substance and a movable part is not used and special fixing or calibration is unnecessary.