| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for producing high purity ozone with high concentration. SOLUTION: An ozone-containing gas generated by an electrolytic ozone generating means 1 using water as a raw material is dehumidified by dehumidifying means 2, 3. The dehumidified ozone-containing gas is supplied into an adsorption and desorption vessels 4, 5, in which an adsorbent is packed, in a state that the adsorbent is decreased in the temp. to adsorb ozone to the adsorbent, and next, the ozone-containing gas dehumidified by the dehumidifying means 2, 3 is supplied to the adsorption and desorption vessels 4, 5 in a state that the adsorbent is increased in temp. to take out ozone adsorbed to the adsorbent with the ozone-containing gas. |
