Pattern analyzer

摘要

A patterned sample is analyzed by traversing a light spot across the sample and analyzing detected color at several sites to spatially resolve the pattern. A pattern analyzer includes a holder for supporting the sample which is illuminated by projecting the light spot onto the sample. A color sensor receives light reflected by the sample at the light spot and analyzes color of the sample at the spot. The spot is traversed across the sample surface to obtain a plurality of color readings across the surface to spatially resolve the pattern.