发明名称 METHOD AND APPARATUS FOR MEASURING TENSION OF SHADOW MASK
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for simply and correctly measuring a tension of a shadow mask without requiring a special skilled work. SOLUTION: A shadow mask 10 singly and a shadow mask 10 set to a frame 11 are placed on a transmission illumination light source 4. A state where a position of a hole at a tension measurement point moves by a tension when the shadow is set to the frame 11 is picked up with a high magnification by an image pickup apparatus 1. The picked-up image is processed by a computer 2, whereby an amount of the move of the hole position is detected. An amount of the tension correlated to the amount of the move is accordingly operated.
申请公布号 JP2000162064(A) 申请公布日期 2000.06.16
申请号 JP19980340072 申请日期 1998.11.30
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HAMANO SEIJI;KUBO HIROYASU;NAGASAKI TATSUO;NOMURA TAKESHI
分类号 H01J9/42;G01L5/04;H01J9/14;H01J29/07;(IPC1-7):G01L5/04 主分类号 H01J9/42
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