| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspecting system and its inspecting method for preventing erroneous classification of LSIs. SOLUTION: A tester 1 comprises a tester control part 2 for receiving a test start signal 9 of a handler 5 and for controlling overall tests, a test result transmitting part 4 to receive test results of the tester control part 2 and to output the test results to the outside, and a test result comparing part 14 to compare the rest results of the tester control part 2 with the output signal of the test result transmitting part 4 and to output an error signal 13, when they do not matched with each other. The handler 5 comprises both a handler control part 6 for receiving a test end signal 10 of the tester 1 and the error signal 13, and to control the overall handler 5 and a device classification control part 8 to classify devices, on the basis of a pass signal 11 and a fail signal 12 form the tester 1.
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