| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer device which can surely discriminate the size of substrate. SOLUTION: A plurality of cassettes 41 and 42, with different sizes holding a substrate in the laminating direction, are fitted to an elevator mechanism 1a in a selectively attachable state, and a second sensor 11 comprising a transmittance sensor provided with a light emitting element 11a and a photodetector 11b is arranged outside a region where the cassette 42 is fitted to the elevator mechanism 1a. Thus, when the selected cassette is detected, the size of a substrate is detected according to the detection output of the second sensor 11. |
