| 摘要 |
PROBLEM TO BE SOLVED: To specify a leakage place, to easily take a measure against leakage abnormality, and to prevent unnecessary yield reduction by measuring a leaking X-ray dosage by relatively moving an image tube and an X-ray dosimeter. SOLUTION: A measuring piece 7a of an X-ray dosimeter 7 is moved to a position corresponding to an outside diameter position of an envelope 2b of an X-ray image tube 2. The measuring piece 7a is moved to detect the envelope 2b. When finishing confirmation of the size of the envelope 2b, an X-ray is outputted/irradiated from an X-ray tube 1, and a primary dosage inputted to an input surface 2a of the X-ray image tube 2 is measured by an input side X-ray dosimeter 4 to adjust an electric current value between an anode and a cathode. The X-ray image tube 2 and the X-ray dosimeter 7 are relatively moved. When a secondary dosage value measured by the X-ray dosimeter 7 falls within a specified value, the measuring piece 7a is moved to the next observation point of the envelope 2b. When a secondary dosage value measured at a single observation point of the envelope 2b exceeds the specified value, it is displayed as a leakage place.
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