| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam tester, capable of easily correcting the effects of potential contrast which occurs in an electric component and speedily measuring the voltage of the electric component. SOLUTION: An electron beam tester and an image-processing device are provided with a signal generating device so as to provide an electric component 12 with signals, an electron gun 16 for scanning the electric component 12 provided with signals by the signal generating device with an electron beam, a detector 36 for detecting secondary electrons radiated from the electric component 12 by the irradiation of the electric component 12 with an electron beam, an image-creating means 60 to create the scan image of the electric component 12 through the use of the secondary electrons detected by the detector 36, a selecting means 64 to select a partial image of the scan image created by the image-creating means 60, and a correcting means 62 for correcting the scan image through the use of the part of an image selected by the selecting means 64.
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