| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflow furnace wherein the cleanness is high and the furnace atmosphere control is easy. SOLUTION: The furnace comprises a tubular body 1 and a heater for heating the furnace interior. Both ends of the body 1 are opened: one end is a substrate entrance and the other is a substrate outlet. The body 1 is composed of a plurality of combined members 10, 11, the members 10, 11 have heat insulated parts 12, 16, 20 constituting the wall of the body 1 and heat-resistive covers 14, 18 covering at least the inner sides of the heat insulated parts 12, 16, 20. The heater has an electric heater 22 buried in a portion near the furnace interior in the heat insulated part 20 of at least one member 10, 11 constituting the body 1 wall.
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