| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic optical waveguide facilitating integration with other optical elements and generating fewer residues in machining by reactive ion etching(RIE) by providing a clad part made of an inorganic dielectric body covering a core part and having a refraction index lower than that of the core part. SOLUTION: In an organic light waveguide, a silicon oxide film serving as a buffer layer 2 is formed on a board 1 made of silicone or the like, and a core part 3 made of organic polymer is formed on the buffer layer 2. On the core part 3, an upper part clad 4 serving as a mask, which is an upper clad made of an inorganic dielectric body and serves as a mask in machining of the core part 3 by RIE, is formed. An over clad 5 made of an inorganic dielectric body is formed on the clad 4 so as to cover the core part 3. As the inorganic dielectric body for the clads 4, 5, a material with a refraction index lower than that of the core part 3 is selected. As the inorganic dielectric body, silicon oxide is available, for example. |
