| 摘要 |
PROBLEM TO BE SOLVED: To provide wavelength selectivity, to make constitution simple and to make power consumption low by providing a diaphragm type micromachine having a half mirror and arranged between opposed optical fibers so as to be opposed to them, moving the micromachine according to a signal from the outside and changing the length of a Fabry-Perot resonator constituted of the half mirror. SOLUTION: This filter is constituted of two opposed optical fibers 106 and 107, an optical waveguide substrate 101 where a tapered type optical waveguide is formed, the tapered parts 102 and 103 of the optical waveguide, a groove part 104 formed on the substrate 101 and the diaphragm type micromachine 105 arranged in the groove part 104. The micromachine 105 is constituted of a main body, the diaphragm, a spacer, an electrode and the half mirror. The length of the Fabry-Perot resonator is changed by voltage applied to the micromachine 105, so that selected wavelength is changed. |
