发明名称 MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To form a high-performance J-FET element in a simple manufacturing process by a method, wherein an N-channel J-FET element is formed in a P-type well region and the element is formed, using in common each region of an NPN transistor. SOLUTION: A P-type well region 26 is formed in an N-type epitaxial layer 25. A gate contact region 29 of a J-FET element in the region 26 is formed simultaneously with the formation of a base region 28 of an NPN transistor. Moreover, source and drain regions 31 and 32 of the J-FET element are formed simultaneously with the formation of an emitter region 30 in the region 28. An N-type channel region 33 and a top gate region 34 are formed within the region encircled by the region 29. A P+ embedded layer 23 is formed in the lower part of the region 26.
申请公布号 JP2000164724(A) 申请公布日期 2000.06.16
申请号 JP19980340507 申请日期 1998.11.30
申请人 SANYO ELECTRIC CO LTD 发明人 OKODA TOSHIYUKI;OKAWA SHIGEAKI
分类号 H01L21/8222;H01L21/337;H01L21/8248;H01L27/06;H01L29/808;(IPC1-7):H01L21/822 主分类号 H01L21/8222
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