FAILURE ANALYZING SYSTEM OF SEMICONDUCTOR MEMORY AND NAVIGATION METHOD OF SPECIMEN STAGE OF SURFACE OBSERVATION DEVICE

摘要

PROBLEM TO BE SOLVED: To improve efficiency of failure analyzing work of a semiconductor memory by making a physical address of a bad cell and a layout information of a chip surface of a semiconductor memory a navigation information of a specimen stage and observing the surface of the bad cell. SOLUTION: A memory tester 1 detects a bad cell or a semiconductor memory which is an object of failure analysis and outputs the logic address of the bad cell to a logic address/physical address converting means 2. The address converting means 2 collects the logic address of the bad cell and coverts it to a physical address on a chip surface, refering to design data. In a surface observation device 4, the physical address of the bad cell and the layout information of the chip surface of the semiconductor memory in a layout information forming means 3 are made the navigation information of a specimen stage 5, and surface observation of the bad cell is performed.