| 摘要 |
PROBLEM TO BE SOLVED: To cope with a higher integration of a semiconductor, to perform analysis with high measurement accuracy, to provide an easy-to-use user interface for easier analysis, and also efficiently perform compression of analyzed data. SOLUTION: An FB analysis system 105, an inspection data analyzing system 101, and a tester are provided with an LSI design information 107 for data analysis provided as well. Its failure information, analysis data, or inspection conditions are displayed on a display device using multiple windows. At data compression of the analyzed data, storage mode is made different from each other by a mode where defective bits take place. |
