| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor having high sensitivity, superior mass productivity and which can also be integrated type constituted as a circuit. SOLUTION: A sensing layer 1A which is formed so as to mutually overlap layer-like and an auxiliary layer 1B which supports the sensing layer 1A constitute a sensor element 1. The sensing layer 1A comprises a vibrating body 11, which is displaced to a direction parallel to the bonding face of the two layers. The auxiliary layer 1B is jointed to the sensing layer 1A. A recessed part or a through-hole, whose area is larger than that of the vibrating body 11, is provided in a part coming into contact with the vibrating body 11. |
