发明名称 MARK DETECTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a mark detecting device with which a mark position can be detected quickly. SOLUTION: This mark detecting device is composed of a data dividing means 1 which divides input data, the first dividing memories 3 to 5 where the data divided by the data dividing means 1 are accumulated, correlation arithmetic operational units 6 to 8 with which a correlation arithmetic operation is performed, the second memory splits 9 to 11 with which the output of the correlation arithmetic operation is accumulated, and a data reforming part 12 which receives the output of the second dividing memories 3 to 5 and reforms it as a data.
申请公布号 JP2000164484(A) 申请公布日期 2000.06.16
申请号 JP19980332814 申请日期 1998.11.24
申请人 JEOL LTD 发明人 NAKANODA SHINJI
分类号 H01L21/027;G03F7/20;(IPC1-7):H01L21/027 主分类号 H01L21/027
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