| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a valve structure capable of suitably using in a periodical process, wherein pressure falls comparatively low at the time of using for low pressure and a necessary piping rate is minimized by disposing a plurality of valve positions simultaneously connected to a port for selecting first and second fluid passages. SOLUTION: An external valve easing 2 of a valve main body is formed in a cylindrical shape, and a plurality of fluid (outlet) ports C, C, to I, J are arranged along its outer peripheral surface. Inlet/outlet passages 3a, 3b are disposed on both ends of the valve main body. A plug 4 is supported by bearings 5 disposed on centers of both ends of the valve main body. The plug 4 is divided to one or more chambers 4a, 4b by a partition plate 11 so as to take one or more flows. The plugs 4a, 4b are rotated by a control shaft 7, and thereby, outside openings 13a, 13 are disposed on a position aligned to desired ports C to J. Vacuum and/or supplying air are circulated to a system communicated with a corresponding port.</p> |
