发明名称 MONITORING METHOD AND MONITORING DEVICE OF CHEMICAL SUBSTANCE AND COMBUSTION FURNACE USING IT
摘要 PROBLEM TO BE SOLVED: To perform a mass spectrometric ion detection at high speed to allow the real time monitoring by mass spectrally analyzing the ion generated in an ion source, and measuring its ion current. SOLUTION: This device is basically formed of a sample gas collection part 88 for collecting a sample gas from a flue 1 that is the position to be measured, a monitoring part 11 for detecting the substance to be measured from the collected sample gas, and a combustion control device 15 for utilizing the detection result for combustion control. The sample collection part 88 comprises a sample gas collecting probe 3, a sample gas piping 4, a selector valve 6, a filter 7, a sample gas feed pump 8, a waste gas piping 5, a waste gas probe 2 and the like. In the monitoring part 11, the substance to be measured in the fed sample gas is selectively ionized in a high efficiency, and the generated ion is mass spectrally analyzed in a mass spectral part, whereby the substance to be measured is detected (monitored).
申请公布号 JP2000162189(A) 申请公布日期 2000.06.16
申请号 JP19980333680 申请日期 1998.11.25
申请人 HITACHI LTD 发明人 SAKAIRI MINORU;KATO YOSHIAKI;MIZUMOTO MAMORU;HASHIMOTO YUICHIRO;TOKITA JIRO;SUGA MASAO
分类号 H01J49/42;G01N1/22;G01N27/62;G01N33/00;(IPC1-7):G01N27/62 主分类号 H01J49/42
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