发明名称 APPARATUS FOR ALIGNING MOUNTING HEAD
摘要 PROBLEM TO BE SOLVED: To easily and quickly position a mounting head and a work, in a horizontal and vertical planes by supporting a mounting head freely lockably on a lift through a relative movable support on a plane and a spherical bearing, and attaching carrier for a positioning member to a work holder. SOLUTION: A support 9 is unlocked from a spherical bearing 10 to make a mounting head 8 free from a lift 6, and a positioning pin 11 for the mount head is fitted into a positioning hole of a work holder 7 for holding sample, and the bottom of the mount head 8 has the shape as that of a work. When contacting the top face of the work holder 17, positioning of a horizontal plane and a vertical plane is executed. The support 9 and the spherical bearing 10 are secured for completion. Thus the positioning can be made simply and quickly by only unlocking the support 9 from the bearing 10, mounting positioning members and contacting the mount head 8 to the work holder 17.
申请公布号 JP2000164752(A) 申请公布日期 2000.06.16
申请号 JP19980347915 申请日期 1998.11.20
申请人 SHIBUYA KOGYO CO LTD 发明人 KAJII YOSHIHISA
分类号 H01L23/12;(IPC1-7):H01L23/12 主分类号 H01L23/12
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