| 摘要 |
PROBLEM TO BE SOLVED: To reduce the temperature difference between a pressure detecting element and a signal processing element so as to improve the output of a pressure sensor by a method wherein the pressure detecting element is connected to a thermally good thermal conductor and the good thermal conductor is extended to a chamber for the signal processing element. SOLUTION: A pressure detecting element 21 is connected thermally to a lead frame 42 as at least one good thermal conductor, and the good thermal conductor is extended to a chamber 13 for a signal processing element. A gas which is introduced from a pressure source into a chamber 12 in which the pressure detecting element 21 is installed follows the temperature of the pressure source so as to be set to an unstable state. On the other hand, since the chamber 13 in which a signal processing element 22 is installed is a comparatively closed space, it is in a state which is stable in terms of temperature. In addition, due to the heat capacity of the chamber 13 as a whole, the temperature of the signal processing element 22 is nearly equal to the temperature of the chamber 13 so as to be stable. In addition, since the pressure detecting element 21 and the thermally connected good thermal conductor are covered with a protective gel 71 whose heat insulating effect is large, the heat energy of the gas which is introduced into the chamber 12 for the pressure detecting element and that of the pressure detecting element 21 are hard to move.
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