| 摘要 |
PROBLEM TO BE SOLVED: To make substrate contraction in a calcination state a trace in the process after annealing, by making the speed for making a substrate temperature fall in at least one time calcination process after annealing equal to faster than specified times as fast as the speed for making temperature fall in an annealing state. SOLUTION: A substrate is once subjected to annealing for the purpose of preventing substrate contraction when a pattern formed on it is calcined. In annealing, temperature is made to rise at a prescribed speed up to an annealing temperature, ignition processing is performed for some time and temperature is made to fall at a prescribed speed. An electrode, a dielectric layer, a partition wall, a phosphor layer, etc., are formed on the substrate undergoing annealing. In the formation process of each layer, at least one time calcination is required. Here, it is possible to make contraction per 1 m of the substrate <=60μm, further, <=30μm by making the speed for making temperature fall in a calcination state >=3 times, preferably >=4 times as fast as the speed for making temperature fall in an annealing state.
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