| 摘要 |
PROBLEM TO BE SOLVED: To shorten the throughput of an appearance inspection. SOLUTION: This method comprises a first step of lighting an object to be inspected W placed on a first stage 10 and receiving the scattered light, thereby inspecting the object to be inspected W; a second step of lighting the object to be inspected W placed on a second stage 11 and receiving the refracted light, thereby inspecting the object to be inspected W; and a carrying step of carrying the object to be inspected W extending over the first stage 10 and the second stage 11 so as to perform either one of the first step and second step after the other.
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