GAS FLOW RATE CONTROL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a gas flow regulating device to perform carefully thought fine adjustment. SOLUTION: This control device comprises a gas flow rate control part provided with a gas flow rate regulation function and a gas shut-off function to open and close gas; a stepping motor 34 to drive the gas flow rate control part; and a drive control part 58 to control drive of the stepping motor 34. This constitution performs control of a flow rate of gas according to the number of pulses with which the stepping motor 34 is driven, and carefully thought control of a flow rate of gas is practicable.