| 摘要 |
PROBLEM TO BE SOLVED: To surely obstruct drip of liquid, facilitate regulation by even a nonexpert so as to reduce costs by controlling a circulation rate on the basis of a setting pattern so as to set a stream line in a contract condition under control action of a current-carrying quantity, and closing a fluid passage when the stream line becomes in the contract condition. SOLUTION: A motor-operated opening/closing valve 14 is composed of a valve element for controlling a coating liquid flow rate and an electrically driven actuator for controlling a displacement rate of the valve element. A control device 26 is composed of a ROM 34 in which a control program and a plurality of motion control patterns are housed, and a central processing unit 32 for transmitting a current value signal to a current amplifier 30 on the basis of a deviation by comparing a lift position of a valve element on the basis of an enumerated of a pulse counter 28 with a lift position on the basis of a motion control pattern. The valve element is controlled from a valve closing start time of the valve element until a contract condition with such speed that pressure pulsation is not generated. When the valve element achieves the contract condition, namely a valve rapidly closing motion position, the valve element is rapidly closed so as to surely and stably obstruct drip of liquid.
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