PLATE-SHAPED SUBSTRATE CONTAINING UNIT AND CONTAINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for transferring a plate-shaped substrate by which a robot for taking the plate-shaped substrate out can be dispensed with and a glass plate can be taken out by noncontact means. SOLUTION: There are provided a transferable main body 1, a holding portion, a plurality of purging portions 14 for floating purposes, and a discharge portion. The main body 1 serves to contain a plate-shaped substrate therein. The holding portion has a recess 11 provided in an upper surface 10A of the body 10 for placing the plate-shaped substrate thereon and a passing portion (transfer port 11A) for passing the plate-shaped substrate placed on a bottom surface 11E of the recess 11. The portions 14 purge a supplied gas from the surface 11E in order to cause the plate-shaped substrate placed on the surface 11E to float. The discharge portion (purging aperture 16A) serves to push the plate-shaped substrate floated by the portions 14 out toward the passing portion.