| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously execute spacer spraying plural translucent substrates by arranging the plural substrates in alignment to a carrier by a substrate support member in the state of respectively covering the rear surfaces of the spacer spraying surfaces of the plural substrates by mask members. SOLUTION: The rear surfaces of the spacer spraying surfaces of the plural translucent substrates to be subjected to spacer spraying are covered by the mask members. Next, the translucent substrate are held between the recessed parts of a pair of sawteeth 11 formed at a sawtooth shaped jig 9 of the carrier 5, together with the mask members. The plural translucent substrate are arranged in alignment in the carrier 5 at suitable spacings. This carrier 5 is then housed into a chamber 3 for spraying. At this time, the respective translucent substrates held in the carrier 5 are placed and housed in the chamber 3 for housing, in such a manner that the substrates extend in the perpendicular direction. The inside of the chamber 3 for spraying is closed, and the spacers are sprayed from a spraying nozzle 4.
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