| 摘要 |
PROBLEM TO BE SOLVED: To prevent deterioration in positioning precision due to deformation of a component by arranging an energizing member on the opposite side to an adjusted member side in a holder. SOLUTION: An optical element 130 is previously fixed to an adjusting plate 120 and installed to a side wall 142 of an optical module 140 via the adjusting plate 120. A positioning device 100 is provided with an engaging pin 110 holding the adjusting plate 120. The engaging pin 110 is held by a holder plate 105 installed to a movable part 103 of an X-Y stage 101 moving in a plane parallel to the side wall 142. The engaging pin 110 is held slidably in the axial direction inside a through hole 109 arranged in the holder plate 105. A plate spring 115 is installed to the opposite side (a rear end part 106) to the adjusting plate 120 side of the holder plate 105 for energizing the engaging pin 110 toward the side wall 142. A distance between the holder plate 105 and the adjusting plate 120 does not need to be prolonged, aid deformation of the engaging pin 110 can be prevented.
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