| 摘要 |
PROBLEM TO BE SOLVED: To easily replace a split probe card, even if it has only one probe can. SOLUTION: This split probe card is provided with a probe 100 with which a tip contact part 111 comes into contact with the electrode pad of an LSI chip as an object to be measured. In addition, it is provided with a circuit board 200, on which a wiring pattern 230 to which a connection part 121 at the base end of the probe 100 is connected is formed. In addition, it is provided with a probe support part 300, which is attached to the circuit board 200 and which supports the probe 100. The probe 100 is composed of a contact-side probe 110 the tip of which is formed as the contact part 111 and the other end of which is formed as a contact-side contact part 112. In addition, it is composed of a connection-side probe 120 which is a separate body from the contact-side probe 110, the base end of which is formed as the connection part 121 and the other end of which is formed as a connection-side contact part 122. The contact-side probe 110 and the connection-side probe 120 come into contact at both contact parts 112, 122. Both contact parts 112, 122 are constituted, in such a way that they come into contact inside of a through-hole 331 which pass through a guide member 330 installed between the circuit board 200 and the probe support part 300.
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