| 摘要 |
PROBLEM TO BE SOLVED: To increase the detecting accuracy of an angular velocity. SOLUTION: This angular-velocity detecting apparatus and its driving method are provided with a vibrator 1, which comprises at least one branch, for drive, having at least two pairs of drive electrodes to be self-vibrated to an in-plane (or out- of plane) direction and which comprises a branch for detection, having at least one pair of detecting electrodes to be out- of plane (or in-plane) vibrated by the Coriolis force due to rotation. In addition, they are provided with an oscillation circuit 2, which is connected to the driving electrodes of the vibrator so that the vibrator self-vibrates. In addition, they are provided with a detection circuit 3 which is connected to the detecting electrodes at the branch, for the detection of the vibrator 1, which has a current-to-voltage conversion circuit composed of a feedback capacitance and an operational amplifier, which has a DC-cutting capacitance and which has an adder-substracter. In addition, they are provided with a detection circuit 4 which detects the output of the detection circuit 3 by using the output of the oscillation circuit 2. In addition, they are provided with a low-pass filter, which cuts the AC output of the detection circuit 4. |
