| 摘要 |
PROBLEM TO BE SOLVED: To easily make the area of a driving frame and the torsional moment of the driving frame large and to drive a mirror part at a desired scanning angle at low voltage by providing the driving frame coupled with the middle part of a twisted beam and formed on the outside of a frame to be driven and a driving electrode to which driving voltage for driving the driving frame is applied. SOLUTION: This device is provided with three driving frames 7 coupled with the middle part of the twisted beam 3 and respectively separately formed on the outside of the frame to be driven, and the driving electrodes 9a to 9f which are formed at the distance of a gap (go) from the frame 7 and to which the voltage is applied in the case of driving the frame 7 by electrostatic force. Plural kinds of driving voltage Va to Vc having the same prescribed frequency are respectively applied to the electrodes 9a to 9c and plural kinds of driving voltage Vd to Vf having an opposite phase are respectively applied to the electrodes 9d to 9f. Then, the respective frames 7 are driven at the respective angles of torsionθa toθc and the frame to be driven is driven at the scanning angleθs being the total sum of the angles of torsionθa toθc.
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