| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device that is applied to a manufacturing field requiring clean environment and reduces manufacturing costs. SOLUTION: In a manufacturing line that needs to be cleaned, an HEPA filter unit 1 for local cleaning in a transportation passage 9 of a work 21 is installed on the upper ceiling surface of an opening 4 for passing work that becomes the work carry-in/out port of a device 7 for passing a work 21 with a carrying vehicle 3 out of a ceiling surface 50, and clean air is blown to the gap between the carrying vehicle 3 and the device 7 when passing the work 21, thus maintaining the gap to be clean, passing the work 21 under the clean atmosphere, and reliably avoiding the dust contamination of the work 21 on transportation including the passage of the work with the device 7 and the carrying vehicle 3 even without providing an HEPA filter unit on the entire surface of the ceiling surface 50.
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