| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection device constituted so that the emission of light can be easily observed at the same time that a semiconductor device is tested. SOLUTION: A semiconductor inspection system is constituted of a semiconductor test device B having a wafer prober 5 and a tester head 6 and an emission microscope device A having a microscope device 1. The microscope device 1 is constituted by being provided with a microscope part 11, a camera 12 and a transfer lens 10 installed below. Then, the microscope device 1 is driven to be set by a microscope device driving part 2 so that the lens 10 is inserted in the aperture part 61 of the head 6 and opposed to a semiconductor substrate S. Thus, the semiconductor inspection device constituted so that observing magnification can be easily switched and a visual field range can be easily changed by observing a transferred image transferred outside the head 6 by using the microscope part 11 and the camera 12, is obtained.
|
