| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput under improved image-forming state, especially under state where longitudinal astigmatic aberration and non-isotropic distortion are corrected appropriately. SOLUTION: In a scanning projection aligner, a pattern image provided on a projection original is formed on a substrate using a projection optical system and the position relationship between a substrate (W) and a projection optical system (PL) is changed along a scanning direction and at the same time projection exposure is made. In the projection aligner, the projection optical system forms an image in a region in a nonisotropic shape, at least two surfaces G1R2 and G17R2 out of the optical surfaces of optical members G1-G30 for composing the projection optical system are in a shape with different power between a specific meridian direction and a direction that orthogonally crosses it, and the optical surfaces of at least two surfaces are in a shape for correcting at least non-isotropic distortion and axial astigmatic difference. |
