| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe device capable of collectively performing the surface measurement, surface machining, or surface processing of a plurality of samples or in a plurality positions of a sample at the same time. SOLUTION: This device is formed of a stage 6 for placing a sample 5; a probe 1 arranged opposite to the surface of the sample 5; a minute scanning device 2 for minutely scanning the probe 1; a holder 3 for holding the minute scanning device 2; and a drive device 4 for driving the holder 3. In this case, this device is provided with a plurality of scanning devices 2 and a plurality of probes 1 mounted on the minute scanning device 2 and opposed to the sample 5 placed on the stage 6, and it is constituted so that the probes 1 can simultaneously and independently scan.
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