| 摘要 |
PROBLEM TO BE SOLVED: To reduce costs and simplify a control system and at the same time improve the position controllability of a stage. SOLUTION: A stage RST is driven in a Y direction by driving devices 48A and 48B at the upper portion of a base 34. Reaction force that is developed by the drive of the stage is allowed to escape to the ground by the base 34 and independent frames 36 and 38. Also, the stage RST is driven in an X direction by a driving device 56 but the driving reaction force is also allowed to escape to the ground via the frames 36 and 38. Therefore, the driving reaction force of the stage does not become a factor for vibrating the base 34, thus improving the position controllability of the stage. Since the stage is not in rough fine move structure, the configuration itself can be simplified, the number of actuators and the number of interferometer beams can be reduced, and the costs can be reduced and at the same time the control system can be simplified by reducing the number of parts. |
