APPARATUS FOR PREVENTING CLOGGING OF VENT-LINE IN METAL ORGANIC CHEMICAL VAPOR DEPOSITION SYSTEM

摘要

PURPOSE: An apparatus for preventing clogging of a vent-line in a metal organic chemical vapor deposition system is provided to prevent clogging within respective valves, within respective vent-lines or in a portion connected to a main vent-line though used in processes using metal such as MOS(Metal Organic Source) or generating a lot of by-product. CONSTITUTION: A vaporizer vent-line(111) connected to a conventional vaporizer(4), a mixer vent-line(112) connected to a conventional mixer(3) and an LDS(Liquid Delivery System) vent-line(113) extended from an LDS are connected to each other. A main vent-line(200) is connected to an exhaust port of a process chamber to exhaust by-product gas. A trap type drain canister(210) is detachably mounted to a connection part of the vaporizer vent-line(111). A step line(220) is detachably connected to a connection part of the mixer vent-line(112) using the potential energy of discharged MOS.